Analysis group
EDS-equipped scanning electron microscope（SEM-EDS）
| Maker | JEOL Ltd. |
|---|---|
| Model number | JSM-6510 |
| Specification | https://www.jeol.co.jp/en/products/detail/JSM-6510series.html |
| Use | Material analysis |
| Place | Device analysis room |
X-ray CT analyzer（X-CT）
| Maker | Matsusada Precision Inc. |
|---|---|
| Model number | μRay5500-LCTNFRT80 |
| Specification |
Tube voltage: 30-80kV Tube current: 30-150 μA Stage: CT stage, rotational tilt stage, XY stage Resolution: 3.5 μm / pixel (CT stage) Analysis software: μRayVision (image analysis) 3D image restoration, slice analysis, volume calculation, etc. VG studio (image processing) |
| Use |
Non-destructive inspection of devices, samples up to 3 kg (large stage) X-ray transmission image photography, X-ray CT image photography |
| Place | Device evaluation room |
Atomic force microscope（AFM）
| Maker | SHIMADZU CORPORATION |
|---|---|
| Model number | SPM-8100FM |
| Specification | https://www.shimadzu.com/an/products/surface-analysis/high-resolution-scanning-probe-microscope/spm-8100fm/spec.html |
| Use | Observation of liquid crystal alignment interface, Observation of electrochemical reaction on the surface of the negative electrode of a lead-acid battery |
| Place | Clean room |
X-ray diffractometer（XRD）
| Maker | Rigaku Corporation |
|---|---|
| Model number | MiniFlex600 |
| Specification |
Maximum rated output: 600W Rated voltage: 20-40kV (in 1kV increments) Rated current: 2 to 15mA (in 1mA increments) X-ray tube: Cu-Kα Scan mode: θ-2θ method 2θ measurement range: -3 to 145deg Minimum step angle: 0.005deg |
| Use | Crystal structure analysis of substances, Database, Powder analysis, Stress analysis |
| Place | Device evaluation room |
Confocal Laser Scanning Microscopy（CLSM）
| Maker | ZEISS |
|---|---|
| Model number | LSM 5 PASCAL |
| Specification |
Microscope: Inverted Axiovert 200M Observation method: Fluorescence, transmission bright field, transmission partial interference, transmission phase difference (partial) Fluorescent filter (for visual observation): Fset15wf, Fset38wf, Fset49wf Fluorescent filter (CH1): LP475, LP505, LP530, LP560, LP650 Fluorescent filter (CH2): BP475-525, 505-530, 505-600, 530-600, 560-615 Objective lens: Plan-NeoFluor10 ×, 20 ×, 40 × oil Objective lens: Plan-Apochromart 60 × oilDIC, 100 × oilDIC On-board laser: Ar458, 488, 514nm, HeNe543nm Detector: 2 for fluorescence, 1 for transmission Operation and analysis processing system: LSM5 |
| Use | |
| Place | Device evaluation room |
Fourier Transform Infrared Spectroscopy（FT-IR）
| Maker | JASCO Corporation |
|---|---|
| Model number | FT/IR-410 |
| Specification |
Fourier transform type, transmission, reflection, ATR / RAS mode, polarizing plate Resolution: 1,2,4,8,16 cm-1 Wavenumber range: 7800-400cm-1 Light source: Ceramic special light source Detector: DLATGS |
| Use | Intramembrane molecular structure analysis, Identification of surface functional groups |
| Place | Device evaluation room |
Fourier Transform Infrared Spectroscopy（FT-IR）
| Maker | SHIMAZU Corporation |
|---|---|
| Model number | IR-Affinity 1S |
| Specification |
Fourier transform type, transmission ONLY Resolution: 0.5-16 cm-1 Wavenumber range: 7800-350cm-1 |
| Use | Molecular vibration analysis in thin film, Identification of functional groups, Evaluation of impurity |
| Place | Device Fabrication room |
Ultraviolet-visible spectrophotometer（UV-Vis）
| Maker | JASCO Corporation |
|---|---|
| Model number | UV-550 |
| Specification |
Transmission / reflection / integral sphere mode, diffuse reflection measurement, film thickness and refractive index analysis, liquid cell mounting, absorption coefficient measurement Resolution: 0.1nm Measurement wavelength range: 190-900nm Light source: Deuterium discharge tube (190-350nm), Tungsten iodine lamp (330-900nm) Detector: Photomultiplier tube |
| Use | Reflectance and transmittance measurement, Thin film film thickness measurement, Refractive index measurement |
| Place | Device evaluation room |
Manipulator
| Maker | SURUGA SEIKI Co., Ltd. |
|---|---|
| Model number | UGO293 |
| Specification |
[Manipulator] Stroke: 15mm front and back, 15mm left and right Resolution: 0.1 μm / pulse Arm holder: Rotatable from 0 to 90 ° [XY stage] Stroke: 100mm front and back, 75mm left and right Resolution: 0.1 μm / pulse |
| Use | High-precision operation with 1 μm resolution |
| Place | Device analysis room |
Surface Tensiometer，Contact angle meter
| Maker |
【Surface Tensiometer】Kyowa Interface Science Co., Ltd. 【Contact angle meter】Kyowa Interface Science Co., Ltd. |
|---|---|
| Model number |
【Surface Tensiometer】CBVP-A3 【Contact angle meter】CA-DT, DM-100 |
| Specification |
【Surface Tensiometer】Wilhelm method, Use Pt substrate 【Contact angle meter】 Measurement method: Direct reading method using an engineering mirror (θ / 2 method), Measurement range: 0 ° to 180 °, Display resolution: 0.5 °, Field of view: 7.0 (W) x 3.5 (H) mm or less, Scale: 1 scale approx. 0.083 mm (3.000 mm / approx. 36 scale) |
| Use |
【Surface Tensiometer】Measurement of surface tension of liquid 【Contact angle meter】Measurement of sample surface contamination degree, hydrophilicity / hydrophobicity, Measurement of sample surface free energy, Measurement of falling angle |
| Place | Device analysis room |
Abbe refractometer
| Maker | ATAGO CO.,LTD. |
|---|---|
| Model number | DR-M4 |
| Specification | https://www.atago.net/en/products-dr-m-top.php |
| Use | Refractive index measurement＠480，546，589，656 nm |
| Place | Device analysis room |
Hybrid system
| Maker | MICRONIX |
|---|---|
| Model number | MHS550 |
| Specification |
[Frequency counter] Measurement frequency: 1Hz to 10MHz, 10MHz to 250MHz Gate time: 0.01s, 0.1s, 1s, 10s [Function Generator] Output frequency: 0.2Hz to 2MHz Output waveform : Sine wave, square wave, triangular wave and waveforms with different symmetry [Digital Multimeter] Display: 4 1/2 digits (19999 counts), analog bar graph, LCD display Measurement mode: DC voltage, AC voltage, DC current, AC current, resistance, capacitance, logic measurement [DC power supply] Output voltage: 0-30V Output current: 0-2A |
| Use | For device characteristics analysis |
| Place | Device analysis room |
Digital multimeter (2 units)
| Maker | KENWOOD |
|---|---|
| Model number | DL-712 |
| Specification | |
| Use | |
| Place | Device analysis room |
oscilloscope
| Maker | yamato-scientific |
|---|---|
| Model number | WaveAce1001 |
| Specification | https://files.yamato-net.co.jp/support/catalog/p0737_wavesurfer3000.pdf" |
| Use | |
| Place |
oscilloscope
| Maker | Tektronix |
|---|---|
| Model number | TDS460 |
| Specification | |
| Use | |
| Place |
oscilloscope
| Maker | Tektronix |
|---|---|
| Model number | TDS2014C |
| Specification | |
| Use | |
| Place |
oscilloscope
| Maker | HEWLETT PACKARD |
|---|---|
| Model number | 54645A |
| Specification | |
| Use | |
| Place |
oscilloscope
| Maker | Tektronix |
|---|---|
| Model number | 2235 |
| Specification | |
| Use | |
| Place |
oscilloscope
| Maker | Tektronix |
|---|---|
| Model number | TBS1000C |
| Specification | |
| Use | |
| Place |
LCR meter
| Maker | IWATSU ELECTRIC CO.,LTD |
|---|---|
| Model number | PSM3750-2C-IAI2 |
| Specification | https://www.newtons4th.com/products/frequency-response-analyzers/psm3750/ |
| Use | frequency spectroscopy |
| Place | Clean room |
Peeling Tester
| Maker | Imada Co., Ltd. |
|---|---|
| Model number | EMX-1000N |
| Specification | https://www.koeishoji.co.jp/emx.html |
| Use | Peeling test for Flexible display |
| Place | Device fabrication room |
Spectrofluorometer
| Maker | Hitachi High-Tech |
|---|---|
| Model number | F-2700 |
| Specification | https://www.hitachi-hightech.com/global/en/products/analytical-systems/spectrophotometers/fl/f2700.html |
| Use | material asisnal |
| Place | Device fabrication room |
Soiar simulator
| Maker | ASAHI SPECTRA |
|---|---|
| Model number | HAL-320 |
| Specification | https://www.asahi-spectra.co.jp/r_kiki/hal-320.asp |
| Use | Light source for solar cell characterization |
| Place | Device fabrication room |
Lock-in Amplifier
| Maker | NF CORPORATION |
|---|---|
| Model number | LI5660 |
| Specification | https://www.nfcorp.co.jp/pro/mi/lb/lockin/li5600/ |
| Use | Lock-in detection method measurement |
| Place | Device analysis room |
Sample preparation group
High definition 3D printer
| Maker | KEYENCE CORPORATION |
|---|---|
| Model number | AGILISTA-3110 |
| Specification | https://www.keyence.co.jp/products/3d-printers/3d-printers/agilista-3100/models/agilista-3110/ |
| Use | |
| Place | Device analysis room |
Oxygen-gas Plasma Cleaner
| Maker | Femto Science Corporation |
|---|---|
| Model number | CUTE-MP/TD |
| Specification |
Plasma gas：O2 (Ar, N2 CF2 available) Power: 10-100 W Generation Frequency: 20-100 kHz Chamber size: W×D×H 140mm×200mm×110mm |
| Use | Surface cleaning, Improvement of wettability |
| Place | Clean room |
Small electron beam lithography system
| Maker | Sanyu Electron Co., Ltd |
|---|---|
| Model number | ACE-7000EBL |
| Specification |
200nm line drawing (can form patterns of 100nm or less) Drawing area： Acceleration voltage: 20kV (5/10/15/20kV variable) Electron beam diameter： CAD drawing software, SEM function, dimension measurement system |
| Use | Device circuit formation, Functional design, Functional design |
| Place | Clean room |
Micro stereolithography experiment machine
| Maker | Azuma Engineering Machinery Inc. |
|---|---|
| Model number | URM-HP301 |
| Specification | He-Cd laser light source, photo-curing molding, CAD design system |
| Use |
For batch formation of 3D microstructures and shape formation that is difficult with thin film lithography For forming components of functional devices such as solid spheres, tubes, holes, etc. Pattern for forming 3D metal wiring by plating, lift-off, etc. For forming optical elements such as optical waveguides and diffraction gratings |
| Place | Clean room |
Spot UV irradiation units
| Maker | Ushio Inc. |
|---|---|
| Model number | SP-9 |
| Specification | http://www.ushio.co.kr/documents/products/lamphouse/ushio_spot-cure_series.pdf |
| Use | Photopolymerization reaction |
| Place | Clean room |
electromagnet
| Maker | |
|---|---|
| Model number | |
| Specification | 10KG |
| Use | High pretilt angle measurement of liquid crystal alignment |
| Place | Clean room |
Mask Aligner（Exposure device）
| Maker | MIKASA CO., LTD |
|---|---|
| Model number | M-1S |
| Specification | http://photolithography-rd.com/english/maskaligner.html#m-1s |
| Use | For ITO electrode pattern etching processing |
| Place | Clean room |
Alignment film coating equipment group（Spin coater, Hot plate, Electronic balance）
| Maker |
【Spin coater】Mikasa Co., Ltd. 【Hot plate】 【Electronic balance】 |
|---|---|
| Model number |
【Spin coater】MS-B100 Spin Coater 【Hot plate】 【Electronic balance】 |
| Specification |
【Spin coater】http://photolithography-rd.com/english/spin_coating.html#ms-b100 【Hot plate】 【Electronic balance】 |
| Use | LCD cell production |
| Place | Clean room |
Desktop semi-automatic polishing machine
| Maker | Maruto Instrument Co., Ltd. |
|---|---|
| Model number | ML-182 |
| Specification | http://www.maruto.com/products/2-1-2/index.html |
| Use | |
| Place | Clean room |
Cleaning equipment group（Beaker washer, Pure water production equipment, Constant temperature dryer for beaker）
| Maker |
【Beaker washer】SANPLATEC CORPORATION 【Pure water production equipment】 【Constant temperature dryer for beaker】Isuzu Seisakusho Co., Ltd. |
|---|---|
| Model number |
【Beaker washer】 【Pure water production equipment】 【Constant temperature dryer for beaker】MDN-19GA |
| Specification |
【Beaker washer】 【Pure water production equipment】 【Constant temperature dryer for beaker】Holding temperature 300℃, temperature display, PID control, gas replacement specifications, stainless steel specifications |
| Use |
【Beaker washer】Cleaning of experimental jigs with rotating water flow 【Pure water production equipment】Pure water production 【Constant temperature dryer for beaker】For drying beakers, petri dishes, jigs, etc., Chamber for measuring temperature characteristics |
| Place | Clean room |
Desktop small electric furnace, Constant temperature drying furnace, DC sputtering equipment, Plasma reactor (Asher)
| Maker |
【Desktop small electric furnace】NITTO KAGAKU CO.,Ltd 【Constant temperature drying furnace】Yamato Scientific Co., Ltd. 【DC sputtering equipment】Sanyu Electron Co., Ltd 【Plasma reactor】Yamato Scientific Co., Ltd. |
|---|---|
| Model number |
【Desktop small electric furnace】NHK-170 【Constant temperature drying furnace】DX302 【DC sputtering equipment】SC-706 【Plasma reactor】PR301 |
| Specification |
【Desktop small electric furnace】 Maximum operating temperature: 1250℃, Program control: 2 patterns 8 steps, Furnace wall: Ceramic fiber, Heater: Pyromax 【Constant temperature drying furnace】 https://www.yamato-scientific.com/product/show/dx302_2/ 【DC sputtering equipment】 Ar gas, O2 gas, DC bias max 3kV, 6 inch substrate compatible, DC etching 【Plasma reactor】 Barrel chamber type, 300W, O2 plasma ashing type, dial matching method, 3 inch substrate processing possible |
| Use |
【Desktop small electric furnace】P drive for transistors, Formation of thick film oxide layer 【Constant temperature drying furnace】 【DC sputtering equipment】Physical etching of the substrate, Surface hydrophilization treatment, Mo film formation, Precious metal film formation 【Plasma reactor】Removal of organic film such as resist film, Removal of surface organic residue, Surface hydrophilization treatment, Isotropic dry etching of organic film |
| Place | Clean room |
Plating system
| Maker | HARP Co., Ltd. |
|---|---|
| Model number | No.6300 |
| Specification |
Tank capacity: 500cc x 2 Plating current: 50-500mA Degreasing current: 2.8A Heater: 45 ℃ or 55 ℃ |
| Use | Electrolysis of Cu and Al, etc., Fabrication of electroless plating film |
| Place | Clean room |
Critical point drying device
| Maker | JEOL Ltd. |
|---|---|
| Model number | JCPD-5 |
| Specification | Liquefied carbon dioxide, Methanol substitution type, Sample size 20 mm square possible |
| Use | It is used to prevent structural destruction due to liquid processing. It is used for developing fine resist patterns, drying MEMS devices, and drying biological and plant samples. |
| Place | Device analysis room |
Small precision cutting machine
| Maker | Refine Tec Ltd. |
|---|---|
| Model number | RCA-005 |
| Specification | http://refinetec.com/products/000107.html |
| Use | Cutting of single crystal substrate, Processing in any direction, High speed cutting |
| Place | Device analysis room |
Precision manual scriber
| Maker | Musashino Denshi, INC. |
|---|---|
| Model number | SC-100 |
| Specification | http://www.musashino-denshi.co.jp/english/scribers/#sc-100 |
| Use | Precision cutting of Si single crystal substrate, Minimum 1 mm square cutting |
| Place | Device analysis room |
vacuum packaging
| Maker | Shiro Industry Co. |
|---|---|
| Model number | M2397Z-3103WA |
| Specification | https://shop.webshiro.com/item/M2397Z-3103WA/ |
| Use | Flexible display sealing |
| Place | device work room |
A set of dipcorders
| Maker | SDI Co.,Lnc. |
|---|---|
| Model number | MD-0408-S8 |
| Specification | https://www.sdicompany.com/dipcoater/md0408s8.php |
| Use | Coating of organic materials on substrates |
| Place | clean room |
Thin film group
Optical/LCD group
Rubbing equipment
| Maker |
JOYO ENGINEERING CO., LTD. （Custom-made products） |
|---|---|
| Model number | LQ-015 |
| Specification | Board size: 100mm×100mm |
| Use | Liquid crystal alignment treatment |
| Place | Clean room |
Slit coater experimental system
| Maker | Toray Engineering Co.,Ltd. |
|---|---|
| Model number | |
| Specification | 15mm×25mm |
| Use | Liquid crystal alignment treatment |
| Place | Clean room |
Ellipsometer experimental system such as flexo measurement
| Maker | Self-made |
|---|---|
| Model number | |
| Specification | 589 nm phase difference measurement, Photoelastic modulation method |
| Use | Liquid crystal alignment interface anchoring energy evaluation, Flexo electric coefficient evaluation |
| Place | Device analysis room |
Spectroscopic Ellipsometry
| Maker | JASCO Corporation |
|---|---|
| Model number | M-150 |
| Specification |
Measurement method: PEM dual lock-in method, optical servo/optical reference control method Spectroscope: Double monochrome automatic wavelength driver Measurement wavelength: He-Ne laser (632.8nm) Xe light source (260-860nm) Incident angle range: 40° to 90° continuous automatic setting (0.01° steps) Film thickness measurement range: 0 to 99999A Measurement time: 1msec or more Measurement accuracy: refractive index ±0.01, film thickness ±1A, extinction coefficient ±0.01 Sample chamber: Sample placed vertically Detection system: photomultiplier tube |
| Use | Azimuth anchoring energy measurement of liquid crystal cells. Thickness measurement of thin film. |
| Place | Device evaluation room |
Polarizing microscope
| Maker | Nikon |
|---|---|
| Model number |
ECLIPSE LV100N POL OPTIPHOT2-POL |
| Specification |
https://www.microscope.healthcare.nikon.com/products/polarizing-microscopes/eclipse-lv100n-pol |
| Use | |
| Place | Device evaluation room |
Others
Printed circuit board processing machine（NC lathe）
| Maker | MITS Electronics |
|---|---|
| Model number | FPZ-31AT model160 |
| Specification |
Resolution: 0.00635 Spindle rotation speed: 30,000 to 40,000rpm (board processing), 5000rpm (acrylic plate) Tools: Milling cutter, drill, forming cutter, 10 types automatic replacement Attached CAD software: Flash for Windows |
| Use | Printed circuit board processing, Device mounting substrate processing, Fuel cell housing processing, Acrylic plate processing, MEMS housing processing |
| Place | Device analysis room |
Machine tools (Tabletop milling machine, Tabletop lathe, Tabletop thread saw, Tabletop drilling machine, Double-headed grinder)
| Maker |
【Tabletop milling machine】Toyo Associates LTD. 【Tabletop lathe】Toyo Associates LTD. 【Tabletop thread saw】RYOBI LIMITED 【Tabletop drilling machine】ARCLAND SAKAMOTO CO.,LTD. 【Double-headed grinder】RYOBI LIMITED |
|---|---|
| Model number |
【Tabletop milling machine】LittleMilling9 【Tabletop lathe】Compact9 【Tabletop thread saw】TF-535A 【Tabletop drilling machine】GTTB-13SP 【Double-headed grinder】TG-151 |
| Specification |
【Tabletop milling machine】 https://www.toyoas.jp/products/category/milling/detail.html?p=51&pg=0 【Tabletop lathe】 https://www.toyoas.jp/products/category/senban/detail.html?p=54&pg=0 【Tabletop thread saw】 Cutting capacity: wood 50 mm, mild steel plate 3 mm, brass 4 mm Number of strokes: 950min-1(50Hz), 1100min-1(60Hz) 【Tabletop drilling machine】 Current: 2.6 / 2.4A, Rotation speed: 1450 / 1720rpm, Shift: 5 steps, Rated time: 30min (60Hz) 【Double-headed grinder】 Rotation speed: 3000 / 3600min, Grindstone outer diameter: 150mm, Thickness: 6.4mm / 19mm, Hole diameter: 12.7mm |
| Use | |
| Place | Device analysis room |
Battery-Operated UV Lamp
| Maker | Thermo Fisher Scientific |
|---|---|
| Model number | UV-5F |
| Specification |
Short wave：254nm Wattage: 5W |
| Use | |
| Place | Device analysis room |
Radiation thermometer
| Maker | HORIBA, Ltd. |
|---|---|
| Model number | IT-545N-C |
| Specification | https://www.horiba.com/int/products/detail/action/show/Product/it-545-series-420/ |
| Use | Measure the surface temperature of the object to be measured from a remote location |
| Place | Device analysis room |
Metal halide light source
| Maker | SUMITA OPTICAL GLASS, Inc. |
|---|---|
| Model number | LS-M210 |
| Specification | Color temperature: 6,020-8,500K |
| Use | sample lighting |
| Place | Device analysis room |
gauss meter
| Maker | Yokogawa Electric Corporation |
|---|---|
| Model number | TYPE3251 |
| Specification | |
| Use | |
| Place | clean room |
Oxygen meter
| Maker | New Cosmos Electric |
|---|---|
| Model number | KS-7O |
| Specification | https://denovadetect.com/ |
| Use | Indoor oxygen concentration measurement |
| Place | Sample preparation room |
tesla meter
| Maker | Japan Electromagnetic Instruments |
|---|---|
| Model number | GV-400T |
| Specification |
https://www.j-ndk.co.jp/en/index.html |
| Use | Magnetic field measurement |
| Place | clean room |